Project Description
| Following the Kyoto Protocol, the German government has committed to reducing emissions of greenhouse gases (e.g., CO2, CH4, N2O, H-FKW, FKW and SF6) by approximately 21% by 2012, as compared to 1990 levels.
The semiconductor industry is especially affected by these political guidelines as it releases large quantities of such gases (especially CO2, SF6, NF3 and halogenated fluorine hydrocarbons, or H-FKW). The emissions of the semiconductor industry of H-FKW, FKW, SF6 and NF3 amounted to 0.577 Mio t CO2-equivalents in 1997. Assuming the continuation of current practice, calculations show that by 2010 about 2.1 Mio t CO2-equivalents would be emitted.
This project, initialised by M + W Zander, aims to assess new technologies and concepts that further the reduction of greenhouse gas emissions and mark energy efficient and effective solutions for the semiconductor and solar panel industries. The main objective is the evaluation of new exhaust gas treatment technologies in semiconductor and photovoltaic cell production (e.g., point-of-use abatements, electrically operated plasma burners in combination with catalysts) and the optimization of overall factory strategies for the reduction of greenhouse gas emissions.
The focal point for IAF is the evaluation of reduction potentials of greenhouse gases based on different scenarios for technical plant configuration and the assessment of typical potentials for CO2 reduction with different technical approaches. As a result, a tool for decision-making in the factory planning process of semiconductor and photovoltaic cells plants will be developed, which will meet the requirements of the industry for an effective and economical method. |
Publications | Schottler, M., Hottenroth, H., Schmidt, M. (2008): Reduction of Organic Solvents in Semiconductor Device Manufacturing by Oxidation - An Ecological Assessment. In: Reichl, H. et al. (Eds.): Electronics Goes Green 2008+. Proceedings. IRB Verlag. ISBN 381677668X. P. 959-960 |
